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ASML

The sole supplier of EUV lithography machines — the critical chokepoint of leading-edge manufacturing.

Veldhoven, Netherlands · 1984 · ASML
Milestone note Sep 10, 2026

TSMC and Samsung commit to High-NA — and to rebuilding the photomask to make it worth it

TSMC and Samsung committed to ASML's High-NA EUV scanners, Samsung by 2028 and TSMC by 2030, closing the question of whether the leading foundries would adopt the tool. Intel is already running it. The same week all three joined an ASML initiative to move photomasks from 6-inch to 12-inch, targeting a pilot line in 2031 — because today's mask size costs High-NA about 30% of its throughput.